{"product_id":"mks-153f-16205-smart-exhaust-throttle-valve-integrated-controller-butterfly-used","title":"MKS 153F-16205 Smart Exhaust Throttle Valve Integrated Controller Butterfly USED","description":"\u003cdiv style=\"text-align: center;\"\u003e\u003cstrong\u003eTITLE\u003c\/strong\u003e\u003c\/div\u003e\n\u003cdiv style=\"text-align: center;\"\u003e\u003cspan\u003eMKS 153F-16205 Smart Exhaust Throttle Valve Integrated Controller Butterfly USED\u003cbr\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/div\u003e\n\u003cdiv style=\"text-align: center;\"\u003e\u003cstrong\u003e\u003cspan\u003eProduct Description: \u003c\/span\u003e\u003cspan\u003e\u003c\/span\u003e\u003c\/strong\u003e\u003c\/div\u003e\n\u003cdiv style=\"text-align: center;\"\u003eThe\u003cspan\u003e \u003c\/span\u003e\u003cb data-path-to-node=\"7\" data-index-in-node=\"4\"\u003eMKS 153F-16205\u003c\/b\u003e\u003cspan\u003e \u003c\/span\u003eis a high-precision\u003cspan\u003e \u003c\/span\u003e\u003cb data-path-to-node=\"7\" data-index-in-node=\"39\"\u003eSmart Throttle Valve\u003c\/b\u003e\u003cspan\u003e \u003c\/span\u003eengineered for downstream pressure control in vacuum-based semiconductor processes, such as Etch, CVD, and PVD. This unit functions in two distinct modes—flapper positioning or direct pressure control—reading signal data directly from a pressure transducer to maintain precise chamber environments.\u003cbr\u003eThis device is a\u003cspan\u003e \u003c\/span\u003e\u003cb data-path-to-node=\"1\" data-index-in-node=\"17\"\u003e\"Smart\" Exhaust Throttle Valve with Integrated Controller\u003c\/b\u003e. It integrates all control, communication, and driver circuits within a compact electronics module atop a 253 series butterfly valve, eliminating the need for a separate pressure control electronics box.\u003cbr\u003e\u003cbr\u003e\u003cspan\u003e\u003cstrong\u003e\u003c\/strong\u003e\u003c\/span\u003e\n\u003c\/div\u003e\n\u003cdiv style=\"text-align: center;\"\u003e\u003cspan\u003e\u003cstrong\u003eModel Number: \u003c\/strong\u003e\u003c\/span\u003e\u003c\/div\u003e\n\u003cdiv style=\"text-align: center;\"\u003e\u003cspan\u003e\u003cspan style=\"font-size: large;\"\u003e153F-16205 \u003cbr\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/div\u003e\n\u003cdiv style=\"text-align: center;\"\u003e\n\u003cspan\u003eCondition:\u003c\/span\u003e\u003cspan\u003e\u003cstrong\u003e \u003c\/strong\u003eUsed\u003c\/span\u003e\n\u003c\/div\u003e","brand":"www.myvisionsurplus.com","offers":[{"title":"Default Title","offer_id":52136241824025,"sku":"RACK15_MKS_VALVE_6205","price":1306.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0257\/4565\/3857\/files\/3EEC93AA-29C3-4D97-9884-A93F7D44BDF2.jpg?v=1773819646","url":"https:\/\/www-myvisionsurplus-com.myshopify.com\/products\/mks-153f-16205-smart-exhaust-throttle-valve-integrated-controller-butterfly-used","provider":"www.myvisionsurplus.com","version":"1.0","type":"link"}