MKS 153F-16205 Smart Exhaust Throttle Valve Integrated Controller Butterfly USED

The MKS 153F-16205 is a high-precision Smart Throttle Valve engineered for downstream pressure control in vacuum-based semiconductor processes, such as Etch, CVD, and PVD. This unit functions in two distinct modes—flapper positioning or direct pressure control—reading signal data directly from a pressure transducer to maintain precise chamber environments.
This device is a "Smart" Exhaust Throttle Valve with Integrated Controller. It integrates all control, communication, and driver circuits within a compact electronics module atop a 253 series butterfly valve, eliminating the need for a separate pressure control electronics box.

Condition: Used