Advanced Energy AE Aera TC FC-PA785CT-BF Mass Flow Controller 2 SLM MFC Used
The Aera TC FC-PA785CT-BF is a high-performance Mass Flow Controller (MFC) engineered by Hitachi Metals (Aera) for precision gas delivery in semiconductor and thin-film processes. This specific unit features a full-scale flow capacity of 2 SLM (Standard Liters per Minute) and is part of the TC (Trans-Clean) series, known for ultra-high purity (UHP) and rapid response times.
The FC-PA785 series is a "Pressure-Insensitive" digital MFC, meaning it utilizes advanced internal compensation to maintain a stable flow rate even during fluctuations in line pressure. This makes it an ideal solution for critical etch and CVD applications where consistent gas ratios are vital for wafer yield. The "BF" designation indicates a specific communication and seal configuration (typically DeviceNet and metal-sealed), designed to integrate seamlessly into modern automated tool racks.
