Brooks GF120C-208582 Mass Flow Controller N2 15000 SCCM DeviceNet MFC USED

The Brooks GF120C-208582 (Model: GF120CXXC) is a high-performance Digital Thermal Mass Flow Controller engineered for precision gas delivery in advanced semiconductor processes. This series features Brooks’ proprietary sensor technology and advanced control algorithms to ensure stable flow even during rapid process changes.

As detailed on the provided Certificate of Conformance and Calibration, this specific unit is calibrated for Nitrogen (N2) gas with a full-scale range of 15,000 SCCM (15 SLM). It utilizes a metal-sealed flow path to maintain ultra-high purity standards.