BROOKS PRESSURE CONTROLLER 5866RC1A1C4R2VA FS FLOW RATE: 3 SLPM 5866RT
$340.00
Title:
BROOKS PRESSURE CONTROLLER 5866RC1A1C4R2VA FS FLOW RATE: 3 SLPM 5866RT
Description:
BROOKS PRESSURE CONTROLLER 5866RC1A1C4R2VA FS FLOW RATE: 3 SLPM 5866RT
Description:
The Brooks 5866RC1A1C4R2VA is a versatile Electronic Pressure Controller engineered for high-precision gas handling. Combining an integral control valve with advanced electronics, it eliminates common issues like droop and hysteresis, providing more stable pressure and flow control compared to mechanical regulators.
The Brooks 5866RT Series is a high-performance Pressure Controller and Flow Meter. It is designed to receive a remote pressure transducer signal and, using an adjustable integral PID control algorithm, maintain a desired setpoint by regulating an internal control valve. This model is widely used in semiconductor manufacturing, laboratory research, and thin-film deposition processes.
The Brooks 5866RT Series is a high-performance Pressure Controller and Flow Meter. It is designed to receive a remote pressure transducer signal and, using an adjustable integral PID control algorithm, maintain a desired setpoint by regulating an internal control valve. This model is widely used in semiconductor manufacturing, laboratory research, and thin-film deposition processes.
Model Number: 5866RC1A1C4R2VA
Sale Details:
Item Condition: Used
