Edwards STP-A2203C2 Turbomolecular Pump 2200 L/s ISO250F Inlet
Edwards STP-A2203C2 Turbomolecular Pump | 2200 L/s | ISO250F Inlet | Magnetically Levitated | Used | VSS
Model Number: STP-A2203C2
Condition: Used
Product Description
The Edwards STP-A2203C2 is a high-throughput magnetically levitated turbomolecular pump engineered for the most demanding semiconductor process environments, including dry etch, CVD, sputtering, and ion implantation. Manufactured by Edwards Japan Limited (a Seiko Seiki OEM design), the STP-A2203C2 delivers a pumping speed of 2,200 L/s for nitrogen and 1,700 L/s for hydrogen, with an ultimate base pressure in the 10⁻⁸ Torr range after baking. The pump utilizes full magnetic levitation of the rotor assembly, eliminating mechanical bearing contact, oil lubrication, and associated contamination risk — a critical requirement for ultra-clean deposition and etch process chambers. The ISO250F inlet flange and KF40 outlet allow direct integration into standard tool vacuum architectures. The STP-A2203C2 operates in conjunction with the Edwards SCU-1600 controller, which provides I/O remote interface, RS-232/RS-485 communication, and full pump status monitoring, including start, normal, alarm, and brake states.
Part Compatibility
• Applied Materials Centura Etch, Producer CVD, and Endura PVD Platforms
• Lam Research Kiyo and Flex Etch Systems | Novellus CVD Tools
• Tokyo Electron (TEL) Trias and Antares Etch / CVD Platforms | AMAT P5000 CVD
Part Specification
|
Manufacturer |
Edwards Japan Limited (Seiko Seiki OEM) |
|
Model Number |
STP-A2203C2 |
|
Serial Number |
107012280 |
|
Manufacturing Date |
October 2008 |
|
Type |
Magnetically Levitated Turbomolecular Pump |
|
Pumping Speed (N2) |
2,200 L/s |
|
Pumping Speed (H2) |
1,700 L/s |
|
Compression Ratio (N2) |
> 10⁸ |
|
Compression Ratio (H2) |
2.5 × 10⁴ |
|
Ultimate Pressure |
10⁻⁶ Pa (10⁻⁸ Torr order, after baking) |
|
Max Continuous Flow Rate (N2) |
1,500 sccm |
|
Max Backing Pressure |
400 Pa (3 Torr) |
|
Rated Speed |
27,000 rpm |
|
Allowable Speed Range |
13,500 – 27,000 rpm |
|
Starting Time |
Approx. 7 Minutes |
|
Inlet Flange |
ISO250F |
|
Outlet Flange |
KF40 |
|
Purge Port |
KF10 |
|
Cooling Method |
Water Cooling |
|
Cooling Water Flow Rate |
2 L/min |
|
Cooling Water Temperature |
5°C to 25°C |
|
Cooling Water Pressure |
< 0.3 MPa |
|
Water Fitting Size |
Rc 1/4 (ISO Standard) |
|
Lubrication |
None Required (Magnetically Levitated) |
|
Gas Compatibility |
N2, H2, Cl2, F2, and Process Gases (see manual for restrictions) |
|
Installation Orientation |
Free (Any Orientation) |
|
Controller |
Edwards SCU-1600 |
|
Input Voltage |
200–240 Vac, Single Phase, 50/60 Hz |
|
Max Input Power (Pump Only) |
1,500 VA |
|
Remote Interface |
I/O Remote | RS-232 | RS-485 |
|
Weight |
61 kg |
|
Ambient Temp. Range |
0°C to 40°C |
|
Condition |
Used |
