Nor-Cal Products Genesis GNV-152-P10 Vacuum Gate Valve Pneumatic Rev B USED
The Nor-Cal Products Genesis GNV-152-P10 is an industrial-grade, high-performance Pneumatic Vacuum Gate Valve from the acclaimed Genesis series. Engineered for high-vacuum (HV) and ultra-high vacuum (UHV) semiconductor processing environments, this valve provides a dependable, low-particle isolation seal for process chambers, load locks, and pump manifolds.
This specific unit (Model GNV-152-P10, Revision B) features a robust, space-saving design utilizing an integrated pneumatic actuator with a high-purity internal sealing mechanism protected by US Patent 6289932B1. Nor-Cal’s Genesis series is highly regarded in the wafer fabrication industry for its extreme cycle life and minimal shock mechanism, which significantly reduces particulate generation during actuation to protect sensitive substrates.