VAT 61334-KEHQ-BRZ1 Butterfly Vacuum Control Valve DeviceNet 1000106334 USED
$1,845.00
TITLE
VAT 61334-KEHQ-BRZ1 Butterfly Vacuum Control Valve DeviceNet 1000106334 USED
Product Description:
The VAT 61334-KEHQ-BRZ1 is a high-performance Butterfly Control Valve featuring an integrated DeviceNet interface and controller. Designed for high-purity semiconductor manufacturing, this "Smart" valve combines the mechanical butterfly assembly with advanced digital electronics to provide rapid, precise flapper positioning and pressure control.
This device is a Series 61.3 Butterfly Vacuum Control Valve with an integrated pressure controller. It is a critical component in semiconductor fabrication, used to precisely regulate downstream pressure in vacuum chambers during etch or CVD processes.
This device is a Series 61.3 Butterfly Vacuum Control Valve with an integrated pressure controller. It is a critical component in semiconductor fabrication, used to precisely regulate downstream pressure in vacuum chambers during etch or CVD processes.
Model Number:
61334-KEHQ-BRZ1
Condition: Used
